时间：11月7日下午16：00

 

地点：力学系434会议室

 

内容介绍：

The rapid development of MEMS and nanotechnology in the last decade has
brought researchers the promise of creating sophisticated and tiny devices to
revolute the scientific study and applications. Today’s MEMS and
nanotechnology has become an enabling technology allowing the development
of smart products, augmenting the computational ability of microelectronics with
the perception and control capabilities of microsensors and microactuators and
expanding the space of possible designs and applications.
My vision for MEMS and nanotechnology is developing techniques to facilitate
studies in biology and information technology, which can ultimately lead to
remarkable changes in these areas. In this talk, I will introduce my research in
micro/nano fabrication techniques, including nanoimprint lithography, e-beam
lithography, and our newly invented nanoelectric lithography. We demonstrated
30nm pattern transfer by this nanoelectric lithography. By using these techniques,
we can develop various types of micro/nano devices for different applications.
The first example I will present is a MEMS microswitch driven by surface tension
and electrostatic force for the applications in FPGA and nonvolatile memory.
Another example is a bio-MEMS chip consisting of a resonant cantilever mass
sensor with 2fg mass sensitivity for detection of hazardous chemical and
biological agents.

主讲人介绍：

Wenjiang Shen received his B.S. and M.S. in the Materials Science and Engineering
Department from Tsinghua University, Beijing, China. And he got his Ph.D. from the
University of California, Los Angeles (UCLA) at 2004. Currently, he is working as a
Development Engineer in Innovative Micro Technology (IMT), Santa Barbara, USA.